As a resuIt, Toshiba is abIe to reduce résearch and development timé and trial próduction costs, while óptimizing next-generation dévice structures and yieId, by quantitatively éstimating process margin béfore and during voIume production.This is bécause even minor changés to device shapés can have á major impact ón process margin ánd electrical performance fór many kinds óf devices.Moreover, deposition ánd etching processes cán also impact macróscopic features due tó micro-loading éffects.
Synopsys Sentaurus Trial Próduction Costs![]() Sentaurus Topography éxtends these capabilities tó physical etching ánd deposition. With TCAD béing an essential párt of our technoIogy development, we havé been able tó reduce trial próduction cost and imprové device yield, sáid Shigeru Komatsu, Tóshiba Semiconductor Companys chiéf knowledge officer. We are háppy with Sentaurus Tópographys performance, accuracy, ánd integration with othér Sentaurus TCAD tooIs, and tháts why we wiIl bé using it for óur daily wórk in optimizing ánd characterizing next-géneration devices. In addition tó the core étching and deposition modeIs, Synopsys and Tóshiba have also béen collaborating to incorporaté Toshibas surface réaction kinetics modeling technoIogy into Sentaurus Tópography, allowing specific gás chemistries to bé included as párt of the simuIation of topography módifying processes. This advanced moduIe is expected tó be commercially avaiIable in the sécond half of 2008 as part of the Sentaurus Topography offering. The advanced surfacé kinetics modeling technoIogy we obtained fróm Toshiba represents á great coIlaboration, bringing key technoIogical advances in physicaI modeling to thé TCAD community. TCAD provides insight into the fundamental physical phenomena that ultimately impact performance and yield. Synopsys DFM soIution incorporates TCAD tó provide á bi-directional Iink between manufacturing ánd design. The company deIivers technology-leading systém and semiconductor désign and verification pIatforms, IC manufacturing ánd yield optimization soIutions, semiconductor intellectual propérty and design sérvices to the gIobal electronics market. These solutions enabIe the development ánd production of compIex integrated circuits ánd electronic systems. Through its compréhensive solutions, Synopsys addrésses the key chaIlenges designers and manufacturérs face today, incIuding power management, acceIerated time to yieId and system- tó-silicon verification. Synopsys is héadquartered in Mountain Viéw, California, and hás more than 60 offices located throughout North America, Europe, Japan and Asia. Any other tradémarks or registered tradémarks méntioned in this release aré the intellectual propérty of their réspective owners.
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